Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder

This paper presents the design and construction of a new optical head with two phase-shifted interference signals in an absolute surface encoder by using a mode-locked femtosecond laser. A series of discrete absolute positions of the scale grating is obtained from a series of peak wavelengths of the...

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Veröffentlicht in:International journal of automation technology 2024-03, Vol.18 (2), p.249-256
Hauptverfasser: Sato, Ryo, Liu, Tao, Maehara, Satoru, Okimura, Ryota, Matsukuma, Hiraku, Gao, Wei
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Sprache:eng
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