Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer With Dynamic Control Provision of Effective Cavity Height

A novel biasing scheme having the potential to dynamically control the effective cavity heights of two fabricated, multiple moving membrane capacitive micromachined ultrasonic transducers ( \text{M}^{{3}} -CMUTs) has been developed. With this unique approach, it may be possible to avoid design trade...

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Veröffentlicht in:	IEEE sensors journal 2024-03, Vol.24 (5), p.5852-5859
Hauptverfasser:	Munirathinam, Pavithra, Nazemi, Haleh, Nathani, Muhammad Umair, Raj, Gian Carlo Antony, Elnemr, Youssef Ezzat, Buchanan, Douglas A., Emadi, A. Arezoo
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Dynamic control Dynamic switching effective cavity height Electrodes Finite element method Membranes microelectromechanical systems Micromachining multiple moving membrane capacitive micromachined ultrasonic transducer (M³-CMUT) Resonant frequencies Resonant frequency Sensors Transducers Ultrasonic imaging Ultrasonic transducers ultrasound imaging
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