Analysis and verification on second-order nonlinearity in radio frequency bulk acoustic wave devices employing temperature compensation films

This paper discusses the impact of SiO 2 /SiOF on second harmonic (H2) generation in temperature-compensated (TC) film bulk acoustic resonators (FBARs). First, two types of TC-FBARs are fabricated and their H2 behavior is compared with that of the standard FBAR. Next, the H2 characteristics of the T...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2024-02, Vol.63 (2), p.2
Hauptverfasser:	Ueda, Masanori, Nishizawa, Toshio, Orito, Satoshi, Taniguchi, Shinji, Hashimoto, Ken-ya
Format:	Artikel
Sprache:	eng
Schlagworte:	BAW Bulk acoustic wave devices FBAR Hydrogen production nonlinear SAW Silicon dioxide Simulation SiO SiOF TC-FBAR Temperature compensation Thickness
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