Spectral control of beyond extreme ultraviolet emission from a dual-laser-produced plasma

We demonstrated spectral control of beyond extreme ultraviolet (B-EUV) emission at a central wavelength of 6.76 nm from a gadolinium (Gd) laser-produced plasma. The highest spectral purity (SP) was 5.1% under dual 1-μm laser pulse irradiation. It doubled compared to a value of 2.4% attained under si...

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Veröffentlicht in:	Applied physics letters 2024-01, Vol.124 (5)
Hauptverfasser:	Kume, Masaki, Sugiura, Tsukasa, Morita, Hiroki, Jiang, Weihua, Sakaue, Kazuyuki, Namba, Shinichi, O'Sullivan, Gerry, Higashiguchi, Takeshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Extreme ultraviolet radiation Gadolinium Infrared lasers Irradiation Optical thickness Solid state lasers Spectral control Ultraviolet emission
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