Characterization of the Ion Beam Current Density of the RF Ion Source with Flat and Convex Extraction Systems

The characterization of ion beam current density distribution and beam uniformity is crucial for improving broad-beam ion source technologies. The design of the broad ion beam extraction system directly affects these two parameters, therefore, depending on the application, the design and geometry of...

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Veröffentlicht in:	SILICON 2018-11, Vol.10 (6), p.2743-2749
Hauptverfasser:	Salehi, Maryam, Zavarian, Ali Asghar, Arman, Ali, Hafezi, Fatemeh, Rad, Ghasem Amraee, Mardani, Mohsen, Hamze, Kooros, Luna, Carlos, Naderi, Sirvan, Ahmadpourian, Azin
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Chemistry and Materials Science Current density Density distribution Environmental Chemistry Inorganic Chemistry Ion beams Ion sources Lasers Materials Science Optical Devices Optics Original Paper Photonics Polymer Sciences
Online-Zugang:	Volltext
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