Desirability Function and GA-PSO Based Optimization of Electrochemical Discharge Micro-Machining Performances During Micro-channeling on Silicon-wafer Using Mixed Electrolyte

Silicon-wafer (Si-wafer) is a demandable semiconducting material for micro-fluidic application. Micro-channel on Si-wafer can be produced by electro-chemical discharge micro-machining process (µ-ECDM).Parametric effects on machining depth (MD), overcut (OC) and material removal rate (MRR) has been p...

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Veröffentlicht in:SILICON 2022-10, Vol.14 (15), p.10007-10021
Hauptverfasser: Naik, Ravindra, Sathisha, N.
Format: Artikel
Sprache:eng
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