A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication
A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The im...
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| Veröffentlicht in: | Science China. Physics, mechanics & astronomy mechanics & astronomy, 2016-08, Vol.59 (8), p.50-55, Article 684211 |
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| container_title | Science China. Physics, mechanics & astronomy |
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| creator | Zhang, Zhen Wang, Peng Yan, Peng Guan, YingChun |
| description | A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in： a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm（RMS） error of tracking a circular trajectory. |
| doi_str_mv | 10.1007/s11433-016-0132-x |
| format | Article |
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In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in： a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm（RMS） error of tracking a circular trajectory.</description><identifier>ISSN: 1674-7348</identifier><identifier>EISSN: 1869-1927</identifier><identifier>DOI: 10.1007/s11433-016-0132-x</identifier><language>eng</language><publisher>Beijing: Science China Press</publisher><subject>Algorithms ; Astronomy ; Classical and Continuum Physics ; Control theory ; Direct laser writing ; Fabrication ; Feedback control ; Mechanical analysis ; Modules ; Nanofabrication ; Observations and Techniques ; Physics ; Physics and Astronomy ; Stiffness ; System identification ; Tracking control ; 关键部件 ; 反馈控制算法 ; 定位系统 ; 弯曲 ; 技术支持 ; 旋转对称 ; 激光直写系统 ; 纳米级</subject><ispartof>Science China. Physics, mechanics & astronomy, 2016-08, Vol.59 (8), p.50-55, Article 684211</ispartof><rights>Science China Press and Springer-Verlag Berlin Heidelberg 2016</rights><rights>Science China Press and Springer-Verlag Berlin Heidelberg 2016.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c258x-9bec9ee9cd37f836f133094a3501dd6d42dc1e546931854c736a533c3841b9ae3</citedby><cites>FETCH-LOGICAL-c258x-9bec9ee9cd37f836f133094a3501dd6d42dc1e546931854c736a533c3841b9ae3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/60109X/60109X.jpg</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11433-016-0132-x$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11433-016-0132-x$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Zhang, Zhen</creatorcontrib><creatorcontrib>Wang, Peng</creatorcontrib><creatorcontrib>Yan, Peng</creatorcontrib><creatorcontrib>Guan, YingChun</creatorcontrib><title>A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication</title><title>Science China. Physics, mechanics & astronomy</title><addtitle>Sci. China Phys. Mech. Astron</addtitle><addtitle>SCIENCE CHINA Physics, Mechanics ＆ Astronomy</addtitle><description>A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in： a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm（RMS） error of tracking a circular trajectory.</description><subject>Algorithms</subject><subject>Astronomy</subject><subject>Classical and Continuum Physics</subject><subject>Control theory</subject><subject>Direct laser writing</subject><subject>Fabrication</subject><subject>Feedback control</subject><subject>Mechanical analysis</subject><subject>Modules</subject><subject>Nanofabrication</subject><subject>Observations and Techniques</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Stiffness</subject><subject>System identification</subject><subject>Tracking control</subject><subject>关键部件</subject><subject>反馈控制算法</subject><subject>定位系统</subject><subject>弯曲</subject><subject>技术支持</subject><subject>旋转对称</subject><subject>激光直写系统</subject><subject>纳米级</subject><issn>1674-7348</issn><issn>1869-1927</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><sourceid>AFKRA</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNp9kE9LwzAYh4MoOOY-gLei52jSN02a4xj-g4EXBW8hTdPasTVd0mL99qZW9GYgJITf8_7Cg9AlJTeUEHEbKGUAmFAeN6R4PEELmnOJqUzFabxzwbAAlp-jVQg7EhdIwgRboLd1Ulh9SKq9HQdvcaGDLZNWt65zoekb1zZtnYRe1zYJQ9c5308P-xjzSdl4a3r84ZvefjOVLnxj9IRdoLNK74Nd_ZxL9Hp_97J5xNvnh6fNeotNmuUjloU10lppShBVDryiAEQyDRmhZclLlpaG2oxxCTTPmBHAdQZgIGe0kNrCEl3PczvvjoMNvdq5wbexUqUySqCCkzym6Jwy3oXgbaU63xy0_1SUqMmhmh2q6FBNDtUYmXRmQsy2tfV_k_-Drn6K3l1bHyP328S5ZJKT-PsvLnOAoA</recordid><startdate>20160801</startdate><enddate>20160801</enddate><creator>Zhang, Zhen</creator><creator>Wang, Peng</creator><creator>Yan, Peng</creator><creator>Guan, YingChun</creator><general>Science China Press</general><general>Springer Nature B.V</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>BHPHI</scope><scope>BKSAR</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>L6V</scope><scope>M7S</scope><scope>P5Z</scope><scope>P62</scope><scope>PCBAR</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PTHSS</scope></search><sort><creationdate>20160801</creationdate><title>A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication</title><author>Zhang, Zhen ; Wang, Peng ; Yan, Peng ; Guan, YingChun</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c258x-9bec9ee9cd37f836f133094a3501dd6d42dc1e546931854c736a533c3841b9ae3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Algorithms</topic><topic>Astronomy</topic><topic>Classical and Continuum Physics</topic><topic>Control theory</topic><topic>Direct laser writing</topic><topic>Fabrication</topic><topic>Feedback control</topic><topic>Mechanical analysis</topic><topic>Modules</topic><topic>Nanofabrication</topic><topic>Observations and Techniques</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Stiffness</topic><topic>System identification</topic><topic>Tracking control</topic><topic>关键部件</topic><topic>反馈控制算法</topic><topic>定位系统</topic><topic>弯曲</topic><topic>技术支持</topic><topic>旋转对称</topic><topic>激光直写系统</topic><topic>纳米级</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhang, Zhen</creatorcontrib><creatorcontrib>Wang, Peng</creatorcontrib><creatorcontrib>Yan, Peng</creatorcontrib><creatorcontrib>Guan, YingChun</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>CrossRef</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>Natural Science Collection</collection><collection>Earth, Atmospheric & Aquatic Science Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Earth, Atmospheric & Aquatic Science Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>Engineering Collection</collection><jtitle>Science China. Physics, mechanics & astronomy</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zhang, Zhen</au><au>Wang, Peng</au><au>Yan, Peng</au><au>Guan, YingChun</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication</atitle><jtitle>Science China. Physics, mechanics & astronomy</jtitle><stitle>Sci. China Phys. Mech. Astron</stitle><addtitle>SCIENCE CHINA Physics, Mechanics ＆ Astronomy</addtitle><date>2016-08-01</date><risdate>2016</risdate><volume>59</volume><issue>8</issue><spage>50</spage><epage>55</epage><pages>50-55</pages><artnum>684211</artnum><issn>1674-7348</issn><eissn>1869-1927</eissn><abstract>A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in： a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm（RMS） error of tracking a circular trajectory.</abstract><cop>Beijing</cop><pub>Science China Press</pub><doi>10.1007/s11433-016-0132-x</doi><tpages>6</tpages></addata></record> |
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| subjects | Algorithms Astronomy Classical and Continuum Physics Control theory Direct laser writing Fabrication Feedback control Mechanical analysis Modules Nanofabrication Observations and Techniques Physics Physics and Astronomy Stiffness System identification Tracking control 关键部件 反馈控制算法 定位系统 弯曲 技术支持 旋转对称 激光直写系统 纳米级 |
| title | A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication |
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