Improvement of thermal stability of nickel germanide using nitrogen plasma pretreatment for germanium-based technology

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Veröffentlicht in:	Science China. Information sciences 2018-10, Vol.61 (10), p.109401, Article 109401
Hauptverfasser:	Zhang, Bingxin, An, Xia, Liu, Pengqiang, Hu, Xiangyang, Li, Ming, Zhang, Xing, Huang, Ru
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer Science Germanium Information Systems and Communication Service Letter Nitrogen plasma Thermal stability
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doi_str_mv	10.1007/s11432-018-9398-6
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subjects	Computer Science Germanium Information Systems and Communication Service Letter Nitrogen plasma Thermal stability
title	Improvement of thermal stability of nickel germanide using nitrogen plasma pretreatment for germanium-based technology
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