Tetrahedral Amorphous Carbon Coatings with Al Incorporation Deposited by a Hybrid Technique of Sputtering and Arc Evaporation
In this paper, tetrahedral amorphous carbon (ta-C) coatings containing Al were deposited by a hybrid technique of sputtering and arc evaporation. The influence of Al incorporation in the structure and properties of the ta-C coatings were studied as a function of the Al concentration. It is found tha...
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| creator | Dai, Wei Shi, Yunzhan Wang, Qimin Wang, Junfeng |
| description | In this paper, tetrahedral amorphous carbon (ta-C) coatings containing Al were deposited by a hybrid technique of sputtering and arc evaporation. The influence of Al incorporation in the structure and properties of the ta-C coatings were studied as a function of the Al concentration. It is found that Al tends to form a Al-O-C bond when the Al concentration is small. An Al-C bond was detected when the Al concentration is high. Al can facilitate the graphitization of the ta-C coatings and the graphite cluster size as well as the sp2/sp3 ratio of the coatings increase as the Al concentration increases. The decline of the sp3 fraction causes the drop in the hardness of the coatings. The incorporation of Al can effectively decrease the residual stress of the ta-C coatings. During friction tests, Al can facilitate the formation of the sp2-rich graphitic tribo-layer and decrease the friction coefficient. Nevertheless, the decline of the hardness due to the Al incorporation will result in the increase in the wear rate of the coating. It is believed that the ta-C coating with a proper concentration of Al appears to achieve a good comprehensive performance with high hardness, low residual stress, and a low friction coefficient and wear rate. |
| doi_str_mv | 10.3390/coatings14010142 |
| format | Article |
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The influence of Al incorporation in the structure and properties of the ta-C coatings were studied as a function of the Al concentration. It is found that Al tends to form a Al-O-C bond when the Al concentration is small. An Al-C bond was detected when the Al concentration is high. Al can facilitate the graphitization of the ta-C coatings and the graphite cluster size as well as the sp2/sp3 ratio of the coatings increase as the Al concentration increases. The decline of the sp3 fraction causes the drop in the hardness of the coatings. The incorporation of Al can effectively decrease the residual stress of the ta-C coatings. During friction tests, Al can facilitate the formation of the sp2-rich graphitic tribo-layer and decrease the friction coefficient. Nevertheless, the decline of the hardness due to the Al incorporation will result in the increase in the wear rate of the coating. It is believed that the ta-C coating with a proper concentration of Al appears to achieve a good comprehensive performance with high hardness, low residual stress, and a low friction coefficient and wear rate.</description><identifier>ISSN: 2079-6412</identifier><identifier>EISSN: 2079-6412</identifier><identifier>DOI: 10.3390/coatings14010142</identifier><language>eng</language><publisher>Basel: MDPI AG</publisher><subject>Aluminum ; Arc deposition ; Bonds ; Boron nitride ; Carbon ; Chemical vapor deposition ; Coatings ; Coefficient of friction ; Evaporation ; Friction ; Graphite ; Graphitization ; Hardness ; Hydrogenation ; Ion beams ; Lasers ; Mechanical properties ; Methods ; Morphology ; Residual stress ; Silicon wafers ; Spectrum analysis ; Sputtering ; Wear rate</subject><ispartof>Coatings (Basel), 2024-01, Vol.14 (1), p.142</ispartof><rights>COPYRIGHT 2024 MDPI AG</rights><rights>2024 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). 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The influence of Al incorporation in the structure and properties of the ta-C coatings were studied as a function of the Al concentration. It is found that Al tends to form a Al-O-C bond when the Al concentration is small. An Al-C bond was detected when the Al concentration is high. Al can facilitate the graphitization of the ta-C coatings and the graphite cluster size as well as the sp2/sp3 ratio of the coatings increase as the Al concentration increases. The decline of the sp3 fraction causes the drop in the hardness of the coatings. The incorporation of Al can effectively decrease the residual stress of the ta-C coatings. During friction tests, Al can facilitate the formation of the sp2-rich graphitic tribo-layer and decrease the friction coefficient. Nevertheless, the decline of the hardness due to the Al incorporation will result in the increase in the wear rate of the coating. It is believed that the ta-C coating with a proper concentration of Al appears to achieve a good comprehensive performance with high hardness, low residual stress, and a low friction coefficient and wear rate.</description><subject>Aluminum</subject><subject>Arc deposition</subject><subject>Bonds</subject><subject>Boron nitride</subject><subject>Carbon</subject><subject>Chemical vapor deposition</subject><subject>Coatings</subject><subject>Coefficient of friction</subject><subject>Evaporation</subject><subject>Friction</subject><subject>Graphite</subject><subject>Graphitization</subject><subject>Hardness</subject><subject>Hydrogenation</subject><subject>Ion beams</subject><subject>Lasers</subject><subject>Mechanical properties</subject><subject>Methods</subject><subject>Morphology</subject><subject>Residual stress</subject><subject>Silicon wafers</subject><subject>Spectrum analysis</subject><subject>Sputtering</subject><subject>Wear rate</subject><issn>2079-6412</issn><issn>2079-6412</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpdkcFPwyAUxhujicvc3SOJ504o0MKxqdMtWeLBeW4ohZWlgwqdZgf_d1k2EyMceO_je79HeElyj-AcYw4fpROjsduACEQQkewqmWSw4GlOUHb9J75NZiHsYFwcYYb4JPneqNGLTrVe9KDcOz907hBAJXzjLKguXPBlxg6UPVhZGS3ORzleP6nBBTOqFjRHIMDy2HjTgo2SnTUfBwWcBm_DYRyVjxAgbAtKL8HiU_wS7pIbLfqgZpdzmrw_LzbVMl2_vqyqcp1KDOmYEphJzhvKdJ4r3LZS8bwgopGUY0G1LlCLZS5wQZkiTMYAIp3FLOqYEoinycOZO3gXHxbGeucO3saWdcYRixZKsuian11b0avaWO3i18i4W7U30lmlTdTLgkFWYMpOWHgukN6F4JWuB2_2wh9rBOvTYOr_g8E_rgKDVg</recordid><startdate>20240101</startdate><enddate>20240101</enddate><creator>Dai, Wei</creator><creator>Shi, Yunzhan</creator><creator>Wang, Qimin</creator><creator>Wang, Junfeng</creator><general>MDPI AG</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><orcidid>https://orcid.org/0000-0001-7097-9881</orcidid></search><sort><creationdate>20240101</creationdate><title>Tetrahedral Amorphous Carbon Coatings with Al Incorporation Deposited by a Hybrid Technique of Sputtering and Arc Evaporation</title><author>Dai, Wei ; Shi, Yunzhan ; Wang, Qimin ; Wang, Junfeng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c305t-402c99b58f66e3ddce9674abc593a5ff71d3c6a3758e48ca3701f27581d335403</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Aluminum</topic><topic>Arc deposition</topic><topic>Bonds</topic><topic>Boron nitride</topic><topic>Carbon</topic><topic>Chemical vapor deposition</topic><topic>Coatings</topic><topic>Coefficient of friction</topic><topic>Evaporation</topic><topic>Friction</topic><topic>Graphite</topic><topic>Graphitization</topic><topic>Hardness</topic><topic>Hydrogenation</topic><topic>Ion beams</topic><topic>Lasers</topic><topic>Mechanical properties</topic><topic>Methods</topic><topic>Morphology</topic><topic>Residual stress</topic><topic>Silicon wafers</topic><topic>Spectrum analysis</topic><topic>Sputtering</topic><topic>Wear rate</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dai, Wei</creatorcontrib><creatorcontrib>Shi, Yunzhan</creatorcontrib><creatorcontrib>Wang, Qimin</creatorcontrib><creatorcontrib>Wang, Junfeng</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>AUTh Library subscriptions: ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>ProQuest Materials Science Database</collection><collection>Materials science collection</collection><collection>Access via ProQuest (Open Access)</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><jtitle>Coatings (Basel)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dai, Wei</au><au>Shi, Yunzhan</au><au>Wang, Qimin</au><au>Wang, Junfeng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Tetrahedral Amorphous Carbon Coatings with Al Incorporation Deposited by a Hybrid Technique of Sputtering and Arc Evaporation</atitle><jtitle>Coatings (Basel)</jtitle><date>2024-01-01</date><risdate>2024</risdate><volume>14</volume><issue>1</issue><spage>142</spage><pages>142-</pages><issn>2079-6412</issn><eissn>2079-6412</eissn><abstract>In this paper, tetrahedral amorphous carbon (ta-C) coatings containing Al were deposited by a hybrid technique of sputtering and arc evaporation. The influence of Al incorporation in the structure and properties of the ta-C coatings were studied as a function of the Al concentration. It is found that Al tends to form a Al-O-C bond when the Al concentration is small. An Al-C bond was detected when the Al concentration is high. Al can facilitate the graphitization of the ta-C coatings and the graphite cluster size as well as the sp2/sp3 ratio of the coatings increase as the Al concentration increases. The decline of the sp3 fraction causes the drop in the hardness of the coatings. The incorporation of Al can effectively decrease the residual stress of the ta-C coatings. During friction tests, Al can facilitate the formation of the sp2-rich graphitic tribo-layer and decrease the friction coefficient. Nevertheless, the decline of the hardness due to the Al incorporation will result in the increase in the wear rate of the coating. It is believed that the ta-C coating with a proper concentration of Al appears to achieve a good comprehensive performance with high hardness, low residual stress, and a low friction coefficient and wear rate.</abstract><cop>Basel</cop><pub>MDPI AG</pub><doi>10.3390/coatings14010142</doi><orcidid>https://orcid.org/0000-0001-7097-9881</orcidid><oa>free_for_read</oa></addata></record> |
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| subjects | Aluminum Arc deposition Bonds Boron nitride Carbon Chemical vapor deposition Coatings Coefficient of friction Evaporation Friction Graphite Graphitization Hardness Hydrogenation Ion beams Lasers Mechanical properties Methods Morphology Residual stress Silicon wafers Spectrum analysis Sputtering Wear rate |
| title | Tetrahedral Amorphous Carbon Coatings with Al Incorporation Deposited by a Hybrid Technique of Sputtering and Arc Evaporation |
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