Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering

The morphological parameter of a thin film surface can be characterized by power spectral density (PSD) functions which provide a better description to the topography than the root mean square roughness and imparts several useful information of the surface including fractal and superstructure contri...

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Veröffentlicht in:	Journal of fusion energy 2012-12, Vol.31 (6), p.586-590
Hauptverfasser:	Gelali, Ali, Ahmadpourian, Azin, Bavadi, Reza, Hantehzadeh, M. R., Ahmadpourian, Arman
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Applied sciences Atomic force microscopy Controled nuclear fusion plants Crystallites Dielectric films Energy Energy Systems Energy. Thermal use of fuels Exact sciences and technology Fast Fourier transformations Fourier transforms Fractals Installations for energy generation and conversion: thermal and electrical energy Magnetron sputtering Morphology Nitrides Nuclear Energy Nuclear Fusion Optical properties Original Research Parameters Physics Physics and Astronomy Plasma Physics Power spectral density Protective coatings Roughness Substrates Superstructures Sustainable Development Temperature Thin films Titanium Titanium nitride
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