GaN Optical Devices Integrated With Sol-Gel Films for pH Detection

Accurate pH measurement is essential in numerous applications; however, developing a compact pH-sensing unit with features of quick response, a wide measurement range, and high reliability remains a significant challenge. In this work, the miniaturized design and fabrication of a fully integrated de...

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Veröffentlicht in:	IEEE transactions on electron devices 2024-02, Vol.71 (2), p.1-5
Hauptverfasser:	Lu, Gaofei, Chen, Jian, Chai, Yang, Li, Kwai Hei
Format:	Artikel
Sprache:	eng
Schlagworte:	Emission analysis Film thickness Gallium nitrides GaN integrated device Light emission Light emitting diodes optical device Optical device fabrication Optical films Optical reflection pH detection Photoconductivity Photoelectric effect Semiconductor device measurement Sol-gel processes
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