Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

Design, fabrication, and characterization of SU-8/carbon black (CB) nanocomposite based single axis acceleration sensor is presented. The entire sensor made of SU-8 photosensitive polymer is fabricated using the process spin pattern anchor release device. Thanks to the low young’s modulus of SU-8 po...

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Veröffentlicht in:	Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2020-09, Vol.26 (9), p.2857-2867
Hauptverfasser:	Ahmed, Aftab, Khlifi, Awatef, Pandit, Shardul, Patkar, Rajul, Joshi, Anjali, Dixit, Pradeep, Mezghani, Brahim, Baghini, Maryam Shojaei
Format:	Artikel
Sprache:	eng
Schlagworte:	Cantilever beams Carbon Carbon black Electronics and Microelectronics Electrons Engineering Finite element method Instrumentation Laser doppler vibrometers Mechanical Engineering Microelectromechanical systems Modulus of elasticity Nanocomposites Nanoindenters Nanoparticles Nanotechnology Photosensitivity Plasma etching Polymers Resonant frequencies Sensitivity Sensors Silicon Strain Strain gauges Technical Paper Temperature Temperature effects
Online-Zugang:	Volltext
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