Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects

Sputter deposition of ultrathick ( ≈ 20 μm) Au–Ta alloy coatings on sphero-cylindrical substrates is key for the fabrication of hohlraums for magnetically assisted inertial confinement fusion. Here, we study the deposition of AuTa 4 alloy coatings onto rotating substrates. We use high-power impulse...

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Veröffentlicht in:	Journal of applied physics 2024-01, Vol.135 (3)
Hauptverfasser:	Shin, S. J., Bae, J. H., Engwall, A. M., Bayu Aji, L. B., Baker, A. A., Taylor, G. V., Merlo, J. B., Sohngen, L. R., Moody, J. D., Kucheyev, S. O.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Coatings CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Crystallography Deposition Heavy metal alloys Hohlraums Inertial confinement fusion Magnetron sputtering MATERIALS SCIENCE Plasma diagnostics Rotation sputter deposition Substrates
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