Observation of Particle Behavior between Tool and Workpiece in Ultra-Precision Local Machining of Glass Surfaces Using Organic Abrasive

Organic abrasive machining (OAM) is a local machining method using organic abrasives and elastic rotating tool with a small-diameter, which is applicable to high-spatial-resolution figure correction of high-precision optical surfaces owing to its low machining rate and small spot size. In order to c...

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Veröffentlicht in:	Journal of the Japan Society for Precision Engineering 2023/11/05, Vol.89(11), pp.844-849
Hauptverfasser:	MATSUZAWA, Yusuke, KUME, Takehiro, GUO, Jianli, HIRAGURI, Kentaro, HASHIZUME, Hirokazu, MIMURA, Hidekazu
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Abrasive machining Abrasives Area figure correction High speed cameras high-spatial resolution polishing high-speed imaging organic abrasive Rotation Velocity distribution Workpieces
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