Silicon and gallium nitride electrostatic comb-drive actuators are analyzed for capacitance, displacement, and electric potential distribution

Main objective of this work is to analyse the difference in capacitance value in a structure of electrostatic comb-drive actuators when silicon and gallium nitride are used as a base material. The finite element approach is the foundation for the suggested construction (FEM) which is analysed using...

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Veröffentlicht in:	NeuroQuantology 2022-01, Vol.20 (9), p.2827
Hauptverfasser:	Prakruthi, H L, Saara, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Capacitance Electric fields Finite element method Gallium nitrides Silicon
Online-Zugang:	Volltext
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