Size Effect of the Electron Yield Work on Single-Crystal Silicon Samples

Changes in electron work function (EWF) during the separation of Si(100) single-crystal silicon wafers into smaller samples (scribing operation) have been studied by the method of kinetic curves of EWF. The observed effect can be attributed to the sorption of water vapor on the Si(100) surface. The...

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Veröffentlicht in:	Russian Journal of Physical Chemistry A 2023-12, Vol.97 (12), p.2801-2805
Hauptverfasser:	Sukhorukov, D. O., Pytskii, I. S., Buryak, A. K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemisorption Chemistry Chemistry and Materials Science Etching Low temperature Moisture content Physical Chemistry Physical Chemistry of Dispersive Systems and Surface Phenomena Silicon Silicon wafers Single crystals Size effects Water vapor Work functions
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