Study of the AlPN/GaN high electron mobility transistors with improved transconductance linearity

In this work, an improved method of metal-organic chemical vapor deposition was utilized to grow high-quality AlPN/GaN heterostructures. The characteristics of AlPN those are essential to achieving high linearity in the resulting devices were then investigated. High linearity AlPN/GaN high electron...

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Veröffentlicht in:Applied physics letters 2023-11, Vol.123 (20)
Hauptverfasser: Yao, Yixin, Zhang, Yachao, Zhu, Jiaduo, Dang, Kui, Su, Chunxu, Ma, Jinbang, Chen, Kai, Wang, Baiqi, Liu, Wenjun, Xu, Shengrui, Zhao, Shenglei, Zhang, Jincheng, Hao, Yue
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container_issue 20
container_start_page
container_title Applied physics letters
container_volume 123
creator Yao, Yixin
Zhang, Yachao
Zhu, Jiaduo
Dang, Kui
Su, Chunxu
Ma, Jinbang
Chen, Kai
Wang, Baiqi
Liu, Wenjun
Xu, Shengrui
Zhao, Shenglei
Zhang, Jincheng
Hao, Yue
description In this work, an improved method of metal-organic chemical vapor deposition was utilized to grow high-quality AlPN/GaN heterostructures. The characteristics of AlPN those are essential to achieving high linearity in the resulting devices were then investigated. High linearity AlPN/GaN high electron mobility transistors (HEMTs) with flatter transconductance curves were fabricated, in which the gate voltage swings are 1.85 and 4.35 V at 300 and 400 K when Gm drops 5% from Gm,max. Additionally, the impact of P anti-site defects and surface states on the high linearity of AlPN/GaN HEMTs at different temperatures was discussed. It was found that while both factors benefit linearity at room temperature, only the P anti-site defects have a positive effect on linearity at high temperatures. The results demonstrate the significant advantages of AlPN-based structures in high linearity device applications and provide instructive principles for improving linearity.
doi_str_mv 10.1063/5.0172376
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subjects Applied physics
Defects
Gallium nitrides
Heterostructures
High electron mobility transistors
High temperature
Linearity
Metalorganic chemical vapor deposition
Organic chemistry
Room temperature
Semiconductor devices
Transconductance
title Study of the AlPN/GaN high electron mobility transistors with improved transconductance linearity
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