High-Performance Electrode-Post CMUTs: Fabrication Details and Best Practices

Capacitive micromachined ultrasound transducers (CMUTs) have been investigated for over 25 years due to their promise for mass manufacturing and electronic co-integration. Previously, CMUTs were fabricated with many small membranes comprising a single transducer element. This, however, resulted in s...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2023-10, Vol.PP (10), p.1-1
Hauptverfasser:	Dew, Eric B., Zemp, Roger J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Best practice Capacitive micromachined ultrasound transducer (CMUT) dielectric charging Dielectrics electrode-posts Electrodes Fabrication Membranes microelectromechanical systems (MEMS) microfabrication Micromachining Oxidation Performance evaluation Piezoelectric transducers process flow rectangular membranes Reliability Silicon silicon fusion bonding transducer characterization Ultrasonic imaging wafer bonding yield factors
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