Study on the suitability of ZnO thin film for dynamic pressure sensing application

ZnO thin films were prepared by RF reactive magnetron sputtering on phynox substrate at room temperature for four different thicknesses by varying deposition duration. The structural and morphological properties and composition of these films were characterized using XRD, SEM, and EDS, respectively....

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Veröffentlicht in:	International Journal on Smart Sensing and Intelligent Systems 2020-01, Vol.13 (1), p.1-9
Hauptverfasser:	M. N., Suma, Gaddam, Venkateswarlu, Prasad, M. V. N., Nayak, M. M., Rajanna, K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bandwidths Dynamic pressure Dynamic pressure sensor Film thickness Magnetron sputtering Morphology Organic chemicals Photovoltaic cells Pressure sensors Research methodology Room temperature Scanning electron microscopy Sensors Shock tube Sputtering Substrates Technology application Thin film Thin films Zinc oxide ZnO
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