Development of a Humidity Microsensor for Evaluation of Hermeticity for Retinal Prosthesis

Retinal prosthesis requires a microhermetic package with long-term reliability for the intraocular implantation of devices. The evaluation of the hermetic package generally involves leak testing, but it is challenging to detect micropackages by leak tests owing to their small volume. Therefore, a se...

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Veröffentlicht in:	Sensors and materials 2023-01, Vol.35 (9), p.3189
Hauptverfasser:	Kono, Takuro, Terasawa, Yasuo, Tashiro, Hiroyuki, Ohta, Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerated tests Hermetic sealing Humidity Leak testing Neural prostheses Performance evaluation Photolithography Prostheses Relative humidity Reliability Thermal stress
Online-Zugang:	Volltext
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