MALTA-Cz: a radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrate

Depleted Monolithic Active Pixel Sensor (DMAPS) sensors developed in the Tower Semiconductor 180 nm CMOS imaging process have been designed in the context of the ATLAS ITk upgrade Phase-II at the HL-LHC and for future collider experiments. The “MALTA-Czochralski (MALTA-Cz)” full size DMAPS sensor ha...

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Veröffentlicht in:	Journal of instrumentation 2023-09, Vol.18 (9), p.P09018
Hauptverfasser:	Pernegger, H., Allport, P., Berlea, D.V., Birman, A., Bortoletto, D., Buttar, C., Charbon, E., Dachs, F., Dao, V., Denizli, H., Dobrijevic, D., Dyndal, M., Fenigstein, A., Flores Sanz de Acedo, L., Freeman, P., Gabrielli, A., Gazi, M., Gonella, L., Gonzalez, V., Gustavino, G., Haim, A., Kugathasan, T., LeBlanc, M., Munker, M., Oyulmaz, K.Y., Piro, F., Riedler, P., Sandaker, H., Schioppa, E.J., Sharma, A., Snoeys, W., Solans Sanchez, C., Suligoj, T., Toledano, E., van Rijnbach, M., Vazquez Nunez, M., Weick, J., Worm, S., Zoubir, A.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Active pixel sensors Charge efficiency CMOS Design Design optimization Detector modelling and simulations II (electric fields, charge transport, multiplication and induction, pulse formation, electron emission, etc) Electrical resistivity Electrodes Laboratory tests Large Hadron Collider Manufacturing Particle tracking detectors (Solid-state detectors) Pixels Radiation Radiation tolerance Radiation-hard detectors Sensors Solid state detectors Spatial resolution Substrates Time response
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