Structural design and experimental evaluation of a coarse–fine parallel dual-actuation XY flexure micropositioner with low interference behavior

This paper proposes a novel two degree of freedom large range coarse–fine parallel dual-actuation flexure micropositioner (CFPDFM) with low interference behavior. First, the structure and working principle of the CFPDFM are introduced. Then, based on the stiffness matrix method, the analytical model...

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