Phase fraction of ferroelectric Hf0.5Zr0.5O2 film regulated by the co-action of Ce doping and oxygen defects: First principles study

In this work, the effects of cerium doping and oxygen defects of ferroelectric Hf0.5Zr0.5O2 (HZO) are systematically studied by first-principles calculations. According to the results, the combined effect of Ce atoms and oxygen vacancy has a significant effect on the improvement of the orthorhombic...

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Veröffentlicht in:Journal of applied physics 2023-08, Vol.134 (8)
Hauptverfasser: Tian, Yushui, Zhou, Yulu, Zhao, Miao, Ouyang, Yifang, Tao, Xiaoma
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Sprache:eng
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