Controlling amorphous silicon in scratching for fabricating high-performance micromixers

As core parts of microfluidic chip analysis systems, micromixers show robust applications in wide fields. However, restricted by the fabrication technology, it remains challenging to achieve high-quality micromixers with both delicately designed structure and efficient mixing. In this study, based o...

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Veröffentlicht in:	Lab on a chip 2023-08, Vol.23 (17), p.3794-381
Hauptverfasser:	Chen, Tingting, Cui, Licong, He, Wang, Liu, Renxing, Feng, Chengqiang, Wu, Lei, Wang, Yang, Liu, Huiyun, Qian, Linmao, Yu, Bingjun
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Etching Microfluidics Photovoltaic cells Scratching
Online-Zugang:	Volltext
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