Fabrication and Soft-X-Ray and EUV Range Testing of Au- and Multilayer Mo/Si-Coated Diffraction Gratings with High-Order Blaze

— Blazed and low-roughness 500 lines/mm diffraction gratings, designed for operation in high orders in the soft X-ray and extreme UV (EUV) radiation ranges and having Au and multilayer Mo/Si coatings, have been fabricated by wet anisotropic etching of Si(111)4° vicinal wafers and investigated by ato...

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Veröffentlicht in:	Bulletin of the Lebedev Physics Institute 2023-08, Vol.50 (Suppl 2), p.S250-S261
Hauptverfasser:	Goray, L. I., Berezovskaya, T. N., Mokhov, D. V., Sharov, V. A., Shubina, K. Yu, Pirogov, E. V., Dashkov, A. S., Nashchekin, A. V., Zorina, M. V., Barysheva, M. M., Garakhin, S. A., Zuev, S. Yu, Chkhalo, N. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bilayers Boundary integral method Diffraction efficiency Efficiency Gratings (spectra) Grooves Incidence angle Integral equations Laser Applications and Other Topics in Quantum Electronics Multilayers Physics Physics and Astronomy Reflectometers Roughness Soft x rays
Online-Zugang:	Volltext
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