Dynamic mode suppression and frequency tuning in S-band GaN/YIG magnetoelastic HBARs
This work presents detailed characterization and analysis of recently reported magnetoelastic high overtone bulk acoustic resonators (ME-HBARs), which are multi-mode RF-acoustic (phononic) resonators operating in the S-Band. These unique devices are fabricated by micro-transfer printing (MTP) piezoe...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2023-08, Vol.70 (8), p.1-1 |
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| creator | Gokhale, Vikrant J. Jander, Albrecht Downey, Brian P. Dhagat, Pallavi Mack, Shawn C. Scott Katzer, D. Roussos, Jason A. Meyer, David J. |
| description | This work presents detailed characterization and analysis of recently reported magnetoelastic high overtone bulk acoustic resonators (ME-HBARs), which are multi-mode RF-acoustic (phononic) resonators operating in the S-Band. These unique devices are fabricated by micro-transfer printing (MTP) piezoelectric GaN transducers onto a ferrimagnetic yttrium iron garnet (YIG) substrate. The YIG substrate also supports spin waves (magnons) when biased with an external magnetic field. The resulting phonon-magnon hybridization can be used to suppress or tune the acoustic modes of the ME-HBAR. The experiment spans 66 distinct acoustic resonance modes from 2.4 GHz to 3 GHz, each of which can be suppressed or tuned as much as ± 6 MHz, with a bias magnetic field ≤ 0.21 T. The experimental ME-HBAR data show good agreement with analytical modeling of the magnetoelastic hybridization in YIG. Such ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, or frequency selective limiters in RF signal processing sub-components. By integrating incompatible materials (YIG, epitaxial GaN), and disparate functionalities (spin waves, acoustic waves), into one hybrid multi-domain system, this work also demonstrates the power and broad scope of the MTP technique. |
| doi_str_mv | 10.1109/TUFFC.2023.3283183 |
| format | Article |
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These unique devices are fabricated by micro-transfer printing (MTP) piezoelectric GaN transducers onto a ferrimagnetic yttrium iron garnet (YIG) substrate. The YIG substrate also supports spin waves (magnons) when biased with an external magnetic field. The resulting phonon-magnon hybridization can be used to suppress or tune the acoustic modes of the ME-HBAR. The experiment spans 66 distinct acoustic resonance modes from 2.4 GHz to 3 GHz, each of which can be suppressed or tuned as much as ± 6 MHz, with a bias magnetic field ≤ 0.21 T. The experimental ME-HBAR data show good agreement with analytical modeling of the magnetoelastic hybridization in YIG. Such ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, or frequency selective limiters in RF signal processing sub-components. By integrating incompatible materials (YIG, epitaxial GaN), and disparate functionalities (spin waves, acoustic waves), into one hybrid multi-domain system, this work also demonstrates the power and broad scope of the MTP technique.</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2023.3283183</identifier><identifier>PMID: 37276112</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>United States: IEEE</publisher><subject>Acoustic materials ; Acoustic resonance ; acoustic signal processing ; Acoustic waves ; Acoustics ; Bulk acoustic wave devices ; cavity resonators ; epitaxial layers ; ferrimagnetic materials ; gallium nitride ; Gallium nitrides ; garnets ; heterogeneous integration ; Hybrid systems ; Magnetic fields ; Magnetic resonance ; Magnetoacoustic effects ; magnonics ; Magnons ; microelectromechanical devices ; phononics ; piezoelectric transducers ; Piezoelectricity ; Probes ; Resonators ; Substrates ; Transducers ; tunable devices ; tuning ; yttrium compounds ; Yttrium-iron garnet</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2023-08, Vol.70 (8), p.1-1</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2023</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c352t-625686727011b64ec4fbb1e3fbe77028b020a99ea14713dfad746498636039ec3</citedby><cites>FETCH-LOGICAL-c352t-625686727011b64ec4fbb1e3fbe77028b020a99ea14713dfad746498636039ec3</cites><orcidid>0000-0002-5743-1157 ; 0000-0002-2053-7054 ; 0000-0003-3382-6653 ; 0000-0002-7529-9719 ; 0000-0002-0309-6891 ; 0000-0001-6696-0483</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/10144384$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/10144384$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/37276112$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Gokhale, Vikrant J.</creatorcontrib><creatorcontrib>Jander, Albrecht</creatorcontrib><creatorcontrib>Downey, Brian P.</creatorcontrib><creatorcontrib>Dhagat, Pallavi</creatorcontrib><creatorcontrib>Mack, Shawn C.</creatorcontrib><creatorcontrib>Scott Katzer, D.</creatorcontrib><creatorcontrib>Roussos, Jason A.</creatorcontrib><creatorcontrib>Meyer, David J.</creatorcontrib><title>Dynamic mode suppression and frequency tuning in S-band GaN/YIG magnetoelastic HBARs</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>This work presents detailed characterization and analysis of recently reported magnetoelastic high overtone bulk acoustic resonators (ME-HBARs), which are multi-mode RF-acoustic (phononic) resonators operating in the S-Band. These unique devices are fabricated by micro-transfer printing (MTP) piezoelectric GaN transducers onto a ferrimagnetic yttrium iron garnet (YIG) substrate. The YIG substrate also supports spin waves (magnons) when biased with an external magnetic field. The resulting phonon-magnon hybridization can be used to suppress or tune the acoustic modes of the ME-HBAR. The experiment spans 66 distinct acoustic resonance modes from 2.4 GHz to 3 GHz, each of which can be suppressed or tuned as much as ± 6 MHz, with a bias magnetic field ≤ 0.21 T. The experimental ME-HBAR data show good agreement with analytical modeling of the magnetoelastic hybridization in YIG. Such ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, or frequency selective limiters in RF signal processing sub-components. By integrating incompatible materials (YIG, epitaxial GaN), and disparate functionalities (spin waves, acoustic waves), into one hybrid multi-domain system, this work also demonstrates the power and broad scope of the MTP technique.</description><subject>Acoustic materials</subject><subject>Acoustic resonance</subject><subject>acoustic signal processing</subject><subject>Acoustic waves</subject><subject>Acoustics</subject><subject>Bulk acoustic wave devices</subject><subject>cavity resonators</subject><subject>epitaxial layers</subject><subject>ferrimagnetic materials</subject><subject>gallium nitride</subject><subject>Gallium nitrides</subject><subject>garnets</subject><subject>heterogeneous integration</subject><subject>Hybrid systems</subject><subject>Magnetic fields</subject><subject>Magnetic resonance</subject><subject>Magnetoacoustic effects</subject><subject>magnonics</subject><subject>Magnons</subject><subject>microelectromechanical devices</subject><subject>phononics</subject><subject>piezoelectric transducers</subject><subject>Piezoelectricity</subject><subject>Probes</subject><subject>Resonators</subject><subject>Substrates</subject><subject>Transducers</subject><subject>tunable devices</subject><subject>tuning</subject><subject>yttrium compounds</subject><subject>Yttrium-iron garnet</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkU1Lw0AQhhdRbK3-AREJePGSdr-ze9RqP6AoaHvwFDbJpKQkm5pNDv33bm0V8TSHeebl5RmErgkeEoL1aLmaTMZDiikbMqoYUewE9YmgIlRaiFPUx0qJkGGCe-jCuQ3GhHNNz1GPRTSShNA-Wj7trKmKNKjqDALXbbcNOFfUNjA2C_IGPjuw6S5oO1vYdVDY4D1M9qupeRl9zKdBZdYW2hpK41ofM3t8eHOX6Cw3pYOr4xyg1eR5OZ6Fi9fpfPywCFMmaBtKKqSSvgomJJEcUp4nCQGWJxBFmKoEU2y0BkN4RFiWmyzikmslmcRMQ8oG6P6Qu21q39O1cVW4FMrSWKg7F1NFGeY-SXj07h-6qbvG-nae4lxpwoT2FD1QaVM710Aeb5uiMs0uJjjeO4-_ncd75_HRuT-6PUZ3SQXZ78mPZA_cHIACAP4k-m8wxdkXu6-DLQ</recordid><startdate>20230801</startdate><enddate>20230801</enddate><creator>Gokhale, Vikrant J.</creator><creator>Jander, Albrecht</creator><creator>Downey, Brian P.</creator><creator>Dhagat, Pallavi</creator><creator>Mack, Shawn C.</creator><creator>Scott Katzer, D.</creator><creator>Roussos, Jason A.</creator><creator>Meyer, David J.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>L7M</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0002-5743-1157</orcidid><orcidid>https://orcid.org/0000-0002-2053-7054</orcidid><orcidid>https://orcid.org/0000-0003-3382-6653</orcidid><orcidid>https://orcid.org/0000-0002-7529-9719</orcidid><orcidid>https://orcid.org/0000-0002-0309-6891</orcidid><orcidid>https://orcid.org/0000-0001-6696-0483</orcidid></search><sort><creationdate>20230801</creationdate><title>Dynamic mode suppression and frequency tuning in S-band GaN/YIG magnetoelastic HBARs</title><author>Gokhale, Vikrant J. ; Jander, Albrecht ; Downey, Brian P. ; Dhagat, Pallavi ; Mack, Shawn C. ; Scott Katzer, D. ; Roussos, Jason A. ; Meyer, David J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c352t-625686727011b64ec4fbb1e3fbe77028b020a99ea14713dfad746498636039ec3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Acoustic materials</topic><topic>Acoustic resonance</topic><topic>acoustic signal processing</topic><topic>Acoustic waves</topic><topic>Acoustics</topic><topic>Bulk acoustic wave devices</topic><topic>cavity resonators</topic><topic>epitaxial layers</topic><topic>ferrimagnetic materials</topic><topic>gallium nitride</topic><topic>Gallium nitrides</topic><topic>garnets</topic><topic>heterogeneous integration</topic><topic>Hybrid systems</topic><topic>Magnetic fields</topic><topic>Magnetic resonance</topic><topic>Magnetoacoustic effects</topic><topic>magnonics</topic><topic>Magnons</topic><topic>microelectromechanical devices</topic><topic>phononics</topic><topic>piezoelectric transducers</topic><topic>Piezoelectricity</topic><topic>Probes</topic><topic>Resonators</topic><topic>Substrates</topic><topic>Transducers</topic><topic>tunable devices</topic><topic>tuning</topic><topic>yttrium compounds</topic><topic>Yttrium-iron garnet</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gokhale, Vikrant J.</creatorcontrib><creatorcontrib>Jander, Albrecht</creatorcontrib><creatorcontrib>Downey, Brian P.</creatorcontrib><creatorcontrib>Dhagat, Pallavi</creatorcontrib><creatorcontrib>Mack, Shawn C.</creatorcontrib><creatorcontrib>Scott Katzer, D.</creatorcontrib><creatorcontrib>Roussos, Jason A.</creatorcontrib><creatorcontrib>Meyer, David J.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Gokhale, Vikrant J.</au><au>Jander, Albrecht</au><au>Downey, Brian P.</au><au>Dhagat, Pallavi</au><au>Mack, Shawn C.</au><au>Scott Katzer, D.</au><au>Roussos, Jason A.</au><au>Meyer, David J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dynamic mode suppression and frequency tuning in S-band GaN/YIG magnetoelastic HBARs</atitle><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle><stitle>T-UFFC</stitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><date>2023-08-01</date><risdate>2023</risdate><volume>70</volume><issue>8</issue><spage>1</spage><epage>1</epage><pages>1-1</pages><issn>0885-3010</issn><eissn>1525-8955</eissn><coden>ITUCER</coden><abstract>This work presents detailed characterization and analysis of recently reported magnetoelastic high overtone bulk acoustic resonators (ME-HBARs), which are multi-mode RF-acoustic (phononic) resonators operating in the S-Band. These unique devices are fabricated by micro-transfer printing (MTP) piezoelectric GaN transducers onto a ferrimagnetic yttrium iron garnet (YIG) substrate. The YIG substrate also supports spin waves (magnons) when biased with an external magnetic field. The resulting phonon-magnon hybridization can be used to suppress or tune the acoustic modes of the ME-HBAR. The experiment spans 66 distinct acoustic resonance modes from 2.4 GHz to 3 GHz, each of which can be suppressed or tuned as much as ± 6 MHz, with a bias magnetic field ≤ 0.21 T. The experimental ME-HBAR data show good agreement with analytical modeling of the magnetoelastic hybridization in YIG. Such ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, or frequency selective limiters in RF signal processing sub-components. By integrating incompatible materials (YIG, epitaxial GaN), and disparate functionalities (spin waves, acoustic waves), into one hybrid multi-domain system, this work also demonstrates the power and broad scope of the MTP technique.</abstract><cop>United States</cop><pub>IEEE</pub><pmid>37276112</pmid><doi>10.1109/TUFFC.2023.3283183</doi><tpages>1</tpages><orcidid>https://orcid.org/0000-0002-5743-1157</orcidid><orcidid>https://orcid.org/0000-0002-2053-7054</orcidid><orcidid>https://orcid.org/0000-0003-3382-6653</orcidid><orcidid>https://orcid.org/0000-0002-7529-9719</orcidid><orcidid>https://orcid.org/0000-0002-0309-6891</orcidid><orcidid>https://orcid.org/0000-0001-6696-0483</orcidid></addata></record> |
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| subjects | Acoustic materials Acoustic resonance acoustic signal processing Acoustic waves Acoustics Bulk acoustic wave devices cavity resonators epitaxial layers ferrimagnetic materials gallium nitride Gallium nitrides garnets heterogeneous integration Hybrid systems Magnetic fields Magnetic resonance Magnetoacoustic effects magnonics Magnons microelectromechanical devices phononics piezoelectric transducers Piezoelectricity Probes Resonators Substrates Transducers tunable devices tuning yttrium compounds Yttrium-iron garnet |
| title | Dynamic mode suppression and frequency tuning in S-band GaN/YIG magnetoelastic HBARs |
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