Room-temperature fabrication of epitaxial ZnO thin films on polymer substrates coated with a seed layer of exfoliated β-Ga2O3 single-crystal thin sheets by pulsed laser deposition

Room-temperature (RT) epitaxial growth of ZnO thin films on flexible cyclo-olefin polymer (COP) substrates coated with the exfoliated β-Ga2O3(100) single crystal thin sheets as a seed layer was investigated using the pulsed laser deposition technique. Scanning electron microscopy (SEM) observations...

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Veröffentlicht in:	Journal of the Ceramic Society of Japan 2023-05, Vol.131 (5)
Hauptverfasser:	Oga, Tomoaki, Kaneko, Satoru, Majima, Yutaka, Miyazaki, Hisashi, Matsuda, Akifumi, Yoshimoto, Mamoru
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Epitaxial growth Gallium oxides Polymer films Polymers Polyolefins Pulsed laser deposition Pulsed lasers Room temperature Single crystals Substrates Thin films Zinc oxide
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