High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature

Integrated photonic platforms have proliferated in recent years, each demonstrating its own unique strengths and shortcomings. However, given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strength...

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Veröffentlicht in:	arXiv.org 2023-06
Hauptverfasser:	Lopez-Rodriguez, Bruno, Roald Van Der Kolk, Aggarwal, Samarth, Sharma, Naresh, Li, Zizheng, Van Der Plaats, Daniel, Scholte, Thomas, Chang, Jin, Pereira, Silvania F, Groeblacher, Simon, Bhaskaran, Harish, Iman Esmaeil Zadeh Zadeh
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous materials Amorphous silicon Low temperature Optical materials Optics Photonics Platforms Refractivity Resonators Silicon carbide Thickness Waveguides
Online-Zugang:	Volltext
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