Double-Band Metasurface Infrared Optics for Integrated Multichannel Spectral Sensors

Simultaneously identifying the composition of mixtures and determining their concentration levels has aroused much attention in recent years to meet the large demands of compact and low-cost infrared spectral sensors to replace their conventional bulky counterparts with costly separated infrared com...

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Veröffentlicht in:	IEEE sensors journal 2023-05, Vol.23 (9), p.10149-10158
Hauptverfasser:	Xu, Lingyi, Lai, Jianjun, Wang, Shaowu, Chen, Changhong, Huang, Lirong, Wang, Chaoming, Zhong, Sicheng, Gao, Yihua
Format:	Artikel
Sprache:	eng
Schlagworte:	Ammonia Arrays Electromagnetic radiation Ethanol Gas sensors Infrared absorption Infrared detectors Internet of Things Low cost Metasurfaces Photolithography Production costs Sensors Silicon substrates Wavelengths
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