Investigating the Reliability of a Negative Capacitance Field Effect Transistor Regarding the Electric Field Across the Oxide Layer
The observation of room temperature sub-60 mV/dec subthreshold slope in MOSFET with ferroelectric layers in the gate stacks has attracted much attention. However, little consideration is given to reliability, which affects the long-term stability of the device. In this work, we investigate the relia...
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Veröffentlicht in: | Journal of electronic materials 2023-05, Vol.52 (5), p.3180-3187 |
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Format: | Artikel |
Sprache: | eng |
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