Effect of Coating Stoichiometry and Annealing on Phase Composition of Y–Al–O Compounds

The paper presents research results of Y–Al–O system-based coatings synthesized by cathodic-arc deposition simultaneously from two electric-arc evaporators with single-component Y and Al cathodes. Three different modes of annealing are used. After the deposition process, the coatings are annealed in a vacuum furnace at 800 and at 1200°C to identify the effect from the annealing temperature on the phase composition. The formation of the YAlO 3 phase occurs in all annealing modes. More complex Y 3 Al 5 O 12 and Y 4 Al 2 O 9 oxides appear with increasing process temperature. According to the X-ray diffraction analysis, the process temperature and deposition mode affect the phase composition of the coating, which acquires the amorphous structure. The coating structure is studied on a scanning electron microscope. After 1200°C annealing, the coating sublayer diffusion occurs in the base material.