A 63 μg/√Hz Noise Floor and 14 pJ Power Efficiency Open-Loop MEMS Capacitive Accelerometer Using Closed-Loop Hybrid Dynamic Amplifier

MEMS capacitive accelerometer for the Internet of Things (IoT) applications is designed with open-loop structure rather than close-loop structure to achieve low power consumption. In the open-loop structure, voltage control readout technique is preferred for low cost. However, voltage control readou...

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Veröffentlicht in:	IEEE transactions on circuits and systems. I, Regular papers Regular papers, 2023-04, Vol.70 (4), p.1531-1541
Hauptverfasser:	Zhong, Longjie, Liu, Shubin, Xu, Donglai, Zhu, Zhangming
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometers Amplifiers Circuits Closed loops Electric potential Internet of Things Low noise Noise reduction Power consumption Power efficiency Voltage
Online-Zugang:	Volltext
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