Structure and Phase Composition of Magnetronsputter-Deposited Corrosion Resistant Al–Si–N/Ni/Al–Si–N Coatings

The paper studies the magnetron sputter-deposited multilayer, multicomponent Al–Si–N/Ni/Al–Si–N coating possessing higher corrosion resistance. Studied are the phase and elemental composition of the coating and its structural layers. It is found that all coating layers have a columnar structure. The...

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Veröffentlicht in:	Russian physics journal 2022-12, Vol.65 (8), p.1311-1317
Hauptverfasser:	Dorofeeva, T. I., Fedorischeva, M. V., Gubaidulina, T. A., Sergeev, V. P., Kalashnikov, M. P., Voronov, A. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Columnar structure Condensed Matter Physics Corrosion resistance Corrosion tests Crystal structure Hadrons Heavy Ions Lasers Mathematical and Computational Physics Multilayers Nickel Nuclear Physics Optical Devices Optics Phase composition Photonics Physics Physics and Astronomy Protective coatings Silicon Theoretical X-ray diffraction
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