Structure and Phase Composition of Magnetronsputter-Deposited Corrosion Resistant Al–Si–N/Ni/Al–Si–N Coatings

The paper studies the magnetron sputter-deposited multilayer, multicomponent Al–Si–N/Ni/Al–Si–N coating possessing higher corrosion resistance. Studied are the phase and elemental composition of the coating and its structural layers. It is found that all coating layers have a columnar structure. The...

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Veröffentlicht in:Russian physics journal 2022-12, Vol.65 (8), p.1311-1317
Hauptverfasser: Dorofeeva, T. I., Fedorischeva, M. V., Gubaidulina, T. A., Sergeev, V. P., Kalashnikov, M. P., Voronov, A. V.
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container_end_page 1317
container_issue 8
container_start_page 1311
container_title Russian physics journal
container_volume 65
creator Dorofeeva, T. I.
Fedorischeva, M. V.
Gubaidulina, T. A.
Sergeev, V. P.
Kalashnikov, M. P.
Voronov, A. V.
description The paper studies the magnetron sputter-deposited multilayer, multicomponent Al–Si–N/Ni/Al–Si–N coating possessing higher corrosion resistance. Studied are the phase and elemental composition of the coating and its structural layers. It is found that all coating layers have a columnar structure. The structure of the Al–Si–N coating is nanocrystalline, while the structure of the nickel layer is finely crystalline. The X-ray diffraction (XRD) analysis shows that AlN and Si 3 N 4 phases with the hexagonal closed packed crystal structure are present in the Al–Si–N layer, which is confirmed by the XRD patterns obtained on a transmission electron microscope. According to corrosion tests, the corrosion resistance of specimens coated by the Al–Si–N/Ni/Al–Si–N coating, is higher than that of uncoated specimens.
doi_str_mv 10.1007/s11182-023-02767-w
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source Springer Nature - Complete Springer Journals
subjects Aluminum
Columnar structure
Condensed Matter Physics
Corrosion resistance
Corrosion tests
Crystal structure
Hadrons
Heavy Ions
Lasers
Mathematical and Computational Physics
Multilayers
Nickel
Nuclear Physics
Optical Devices
Optics
Phase composition
Photonics
Physics
Physics and Astronomy
Protective coatings
Silicon
Theoretical
X-ray diffraction
title Structure and Phase Composition of Magnetronsputter-Deposited Corrosion Resistant Al–Si–N/Ni/Al–Si–N Coatings
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