Investigation of the Mo and MoNx Thin Films for Superconducting Electronics Application

With the increase in integration and the layers of superconducting electronics circuits, molybdenum (Mo)-based films become attractive resistive and inductive functional components because of the large kinetic inductance with the deep magnetic field penetration depth. A DC magnetron sputtering techn...

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Veröffentlicht in:	Journal of low temperature physics 2023, Vol.210 (1-2), p.182-193
Hauptverfasser:	Sun, Xiaoying, Huang, Mingzhong, Wang, Zhenyu, Zhao, Lijie, Li, Jinjin, Li, Wan, Chen, Jian, Xu, Xiaolong, Zhang, Mingyu, Sun, Tianbao, Zhao, Xiaobo, Wang, Xueshen
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterization and Evaluation of Materials Circuits Condensed Matter Physics Crystal structure Deposition Diffraction patterns Electrical properties Electronics Inductance Low temperature physics Magnetic field penetration depth Magnetic Materials Magnetism Magnetron sputtering Molybdenum Penetration depth Physical properties Physics Physics and Astronomy Superconductivity Surface roughness Thin films Transition temperature
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