Backstepping-based tracking control of the vertical gradient freeze crystal growth process

The vertical gradient freeze crystal growth process is the main technique for the production of high quality compound semiconductors that are vital for today's electronic applications. A simplified model of this process consists of two 1D diffusion equations with free boundaries for the tempera...

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Veröffentlicht in:	arXiv.org 2023-01
Hauptverfasser:	Ecklebe, Stefan, Gehring, Nicole
Format:	Artikel
Sprache:	eng
Schlagworte:	Closed loops Controllers Crystal growth Crystals Decoupling Free boundaries Gallium arsenide Ordinary differential equations Partial differential equations Single crystals Tracking control Transformations (mathematics)
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