Evaluation of Titanium Vacuum Chamber as Getter Pump

Methods for removing the surface oxide film have been investigated to make a titanium vacuum chamber itself act as a getter pump. The build-up test of the titanium chamber has been performed to investigate the effect of baking. The result showed that the higher the baking temperature the lower the p...

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Veröffentlicht in:	E-journal of surface science and nanotechnology 2022/05/07, Vol.20(2), pp.107-118
Hauptverfasser:	Kamiya, Junichiro, Takano, Kazuhiro, Yuza, Hiromu, Wada, Kaoru
Format:	Artikel
Sprache:	eng
Schlagworte:	Accumulation Baking Diffusion High temperature High vacuum NEG coating Orifices Oxide coatings Photoelectrons Pumping Sputtering Surface oxide film Thermal diffusion Titanium Titanium oxides Titanium vacuum chamber Vacuum chambers Vacuum furnaces
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