Nanoscale Fabrication of Graphene by Hydrogen-Plasma Etching

Graphene is attracting vast interest due to its superior electronic and mechanical properties. However, structure and electronic properties of its edge are often neglected, although they are important for nanoscale devices because the edge ratio becomes larger by decreasing the device size. In this...

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Veröffentlicht in:	E-journal of surface science and nanotechnology 2022/05/28, Vol.20(3), pp.139-144
Hauptverfasser:	Yokosawa, Takamoto, Kamada, Masahiro, Ochi, Taisuke, Koga, Yuki, Takehara, Rin, Hara, Masahiro, Matsui, Tomohiro
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Atomic structure Graphene Honeycomb structures Hydrogen Hydrogen-plasma etching Mechanical properties Nanotechnology devices Plasma etching Raman spectroscopy
Online-Zugang:	Volltext
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