Structuring of thin films by ultrashort laser pulses

Modern life and global communication would not be possible without technologically tailored thin films; they are omnipresent in daily life applications. In most cases, the films are deposited entirely at the carrying substrates in a specific processing step of the device or sample. In some cases, ho...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2023, Vol.129 (1), Article 14
Hauptverfasser:	Bonse, Jörn, Krüger, Jörg
Format:	Artikel
Sprache:	eng
Schlagworte:	50th Anniversary of Applied Physics Applied physics Characterization and Evaluation of Materials Chemical effects Condensed Matter Physics Femtosecond pulsed lasers Laser processing Machines Manufacturing Materials science Nanotechnology Optical and Electronic Materials Physics Physics and Astronomy Processes S.I. : 50th Anniversary of Applied Physics Substrates Surfaces and Interfaces Thin Films Ultrashort pulsed lasers
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