Frame Micro-Optoelectromechanical Angular Velocity Transducer with Optical Readout Units Based on the Optical Tunneling Effect

The article proposes a model of a frame micro-optoelectromechanical angular velocity transducer with electrostatic excitation of primary oscillations. The transducer comprises optical readout units based on the optical tunnel effect to perform a precision optical reading of submicrometer movements o...

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Veröffentlicht in:	Measurement techniques 2022-08, Vol.65 (5), p.360-365
Hauptverfasser:	Busurin, V. I., Kazaryan, A. V., Shtek, S. G., Zheglov, M. A., Vasetskiy, S. O., Kyi, P. L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical Chemistry Angular velocity Characterization and Evaluation of Materials Circuit components Measurement Science and Instrumentation Moving object recognition Optical communication Parameter sensitivity Physical Chemistry Physics Physics and Astronomy
Online-Zugang:	Volltext
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