Fabrication Methods for Microscale 3D Structures on Silicon Carbide

Silicon carbide (SiC) is an attractive material for many industrial applications, such as semiconductors, electronic power devices, and optical and mechanical devices, owing to its wide bandgap, high thermal and wear resistance, and chemical inertness. Although SiC has superior properties, fabricati...

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Veröffentlicht in:	International journal of precision engineering and manufacturing 2022-12, Vol.23 (12), p.1477-1502
Hauptverfasser:	Cho, Younghak, Hwang, Jihong, Park, Min-Soo, Kim, Bo Hyun
Format:	Artikel
Sprache:	eng
Schlagworte:	Electronic devices Engineering Industrial and Production Engineering Industrial applications Materials Science Mechanical devices Review Silicon carbide State-of-the-art reviews Thermal resistance Wear resistance
Online-Zugang:	Volltext
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