Effect of oxygen flow on the optical properties of hafnium oxide thin films by dual-ion beam sputtering deposition

Hafnium oxide (HfO 2 ) is an important high-refractive-index material used in the optical thin films. Dual beam ion sputtering is one of the most important methods for preparing HfO 2 films. This study systematically investigated the optical, structural, and compositional properties of HfO 2 films b...

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