Homogenization and reduction of the roughness of polished sapphire surfaces via inert gas plasma post-processing

In this paper, we report on the post-processing of classically precision polished sapphire surfaces by means of a dielectric barrier discharge plasma at atmospheric pressure. Here, the lateral distribution of roughness values over the surface was significantly reduced, leading to a higher lateral ho...

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Veröffentlicht in:	Optical materials express 2022-11, Vol.12 (11), p.4354
Hauptverfasser:	Gerhard, Christoph, Tasche, Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	Dielectric barrier discharge Gas plasmas Homogeneity Laser applications Optical components Rare gases Reduction Roughness Sapphire
Online-Zugang:	Volltext
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