Study on the Effect of Thermal Shock on Al‐Doped ZnO Films

Al‐doped ZnO (AZO) films are fabricated on Si wafer and quartz glass by radio‐frequency (RF) magnetron sputtering. 2 × 2 × 2 AZO supercells are built and analyzed using first principles based on density functional theory. The thermal shock is performed on AZO with 10, 20, 30, 40, and 50 shocks accor...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2022-10, Vol.219 (19), p.n/a
Hauptverfasser:	Kong, Lingqiang, Sun, Ximei, Mo, Zhao, Liu, Zhixiang, Tang, Yunqing
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum AZO Conduction bands Density functional theory Electromagnetic absorption First principles Fourier transforms Magnetron sputtering Oxygen Oxygen content Photoelectricity Photoelectrons Photovoltaic cells Radio frequency Silica glass Silicon Solar cells Thermal factors Thermal shock Wurtzite X-ray diffraction Zinc oxide
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