The effect of deposition angle and thickness on structural and optical properties of manganese oxide thin films

Manganese oxide thin films were deposited on glass substrates by electron gun evaporation method under ultra-high vacuum condition. Thickness of the layers was measured 60 and 120 nm, by a quartz crystal method. Deposition conditions such as deposition rate, vacuum pressure, incidence of angle and s...

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Veröffentlicht in:Optical and quantum electronics 2022-11, Vol.54 (11), Article 705
Hauptverfasser: Moghtaderi, Amin, Kangarlou, Haleh, Razzazi, Vahedeh
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Sprache:eng
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