Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures

Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated us...

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Veröffentlicht in:	Optical and quantum electronics 2022-11, Vol.54 (11), Article 682
Hauptverfasser:	Shakoury, Reza, Arman, Ali, Miri, Sadegh, Mardani, Mohsen, Rezaee, Sahar, Boochani, Arash, Amraee Rad, Ghasem, Sherafat, Khalil
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Characterization and Evaluation of Materials Computer Communication Networks Electrical Engineering Glass substrates Lasers Magnetic properties Magnetron sputtering Morphology Optical Devices Optical properties Optics Parameters Photonics Physics Physics and Astronomy Thin films Zirconium dioxide
Online-Zugang:	Volltext
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