Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures
Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated us...
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| Veröffentlicht in: | Optical and quantum electronics 2022-11, Vol.54 (11), Article 682 |
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| container_title | Optical and quantum electronics |
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| creator | Shakoury, Reza Arman, Ali Miri, Sadegh Mardani, Mohsen Rezaee, Sahar Boochani, Arash Amraee Rad, Ghasem Sherafat, Khalil |
| description | Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated using surface parameters obtained from atomic force microscopy analysis (AFM) to describe surface morphology in zirconium dioxide layers (ZrO
2
) by RF magnetron sputtering method on substrate made of glass, which are prepared in argon and oxygen gas media. These surface morphology parameters are defined in the special ISO 25178-2 standard. Besides, the transmission of optical spectra and transparency of the samples are obtained by using the optical spectrometer. |
| doi_str_mv | 10.1007/s11082-022-04071-2 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2713464573</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2713464573</sourcerecordid><originalsourceid>FETCH-LOGICAL-c319t-292894d458d9257c16080bb5c1f34a2960054fa35bbb4922074dcfc4ee9405a33</originalsourceid><addsrcrecordid>eNp9kMtq3DAUhkVoINM0L5DVga6dHsny2OquhFwKgYGSQMhGyPLRRNPxpZJMmRfJ80buFLrrQkhw_svRx9glxyuOWH-JnGMjChT5SKx5IU7Yile1KBpeP39gKyxxXTSKqzP2McYdIq5lhSv2tpmSt2YPUxgnCslTBDN00HsbxpjCbNMcCEYHL2EjIL36AZzf9xE6msboE3XQHuDHLfRmO1AK4wBxmlOi4IftV7AmEsQ0dwfIE3KObIpLXOfzO9CQ4PcYfmYtJOrzBmbpi5_YqTP7SBd_73P2dHvzeH1fPGzuvl9_eyhsyVUqhBKNkp2smk6JqrZ8jQ22bWW5K6URao1YSWfKqm1bqYTAWnbWWUmkJFamLM_Z52Nu_v6vmWLSu3EOQ67UoualzJDqRSWOqoVJDOT0FHxvwkFz1At_feSvM3_9h78W2VQeTXFaUFD4F_0f1zsXsIr-</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2713464573</pqid></control><display><type>article</type><title>Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures</title><source>SpringerLink Journals</source><creator>Shakoury, Reza ; Arman, Ali ; Miri, Sadegh ; Mardani, Mohsen ; Rezaee, Sahar ; Boochani, Arash ; Amraee Rad, Ghasem ; Sherafat, Khalil</creator><creatorcontrib>Shakoury, Reza ; Arman, Ali ; Miri, Sadegh ; Mardani, Mohsen ; Rezaee, Sahar ; Boochani, Arash ; Amraee Rad, Ghasem ; Sherafat, Khalil</creatorcontrib><description>Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated using surface parameters obtained from atomic force microscopy analysis (AFM) to describe surface morphology in zirconium dioxide layers (ZrO
2
) by RF magnetron sputtering method on substrate made of glass, which are prepared in argon and oxygen gas media. These surface morphology parameters are defined in the special ISO 25178-2 standard. Besides, the transmission of optical spectra and transparency of the samples are obtained by using the optical spectrometer.</description><identifier>ISSN: 0306-8919</identifier><identifier>EISSN: 1572-817X</identifier><identifier>DOI: 10.1007/s11082-022-04071-2</identifier><language>eng</language><publisher>New York: Springer US</publisher><subject>Argon ; Characterization and Evaluation of Materials ; Computer Communication Networks ; Electrical Engineering ; Glass substrates ; Lasers ; Magnetic properties ; Magnetron sputtering ; Morphology ; Optical Devices ; Optical properties ; Optics ; Parameters ; Photonics ; Physics ; Physics and Astronomy ; Thin films ; Zirconium dioxide</subject><ispartof>Optical and quantum electronics, 2022-11, Vol.54 (11), Article 682</ispartof><rights>The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c319t-292894d458d9257c16080bb5c1f34a2960054fa35bbb4922074dcfc4ee9405a33</citedby><cites>FETCH-LOGICAL-c319t-292894d458d9257c16080bb5c1f34a2960054fa35bbb4922074dcfc4ee9405a33</cites><orcidid>0000-0002-7484-2177 ; 0000-0002-3332-0620 ; 0000-0001-5034-0810 ; 0000-0003-1246-0453 ; 0000-0002-2383-4169</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11082-022-04071-2$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11082-022-04071-2$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids></links><search><creatorcontrib>Shakoury, Reza</creatorcontrib><creatorcontrib>Arman, Ali</creatorcontrib><creatorcontrib>Miri, Sadegh</creatorcontrib><creatorcontrib>Mardani, Mohsen</creatorcontrib><creatorcontrib>Rezaee, Sahar</creatorcontrib><creatorcontrib>Boochani, Arash</creatorcontrib><creatorcontrib>Amraee Rad, Ghasem</creatorcontrib><creatorcontrib>Sherafat, Khalil</creatorcontrib><title>Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures</title><title>Optical and quantum electronics</title><addtitle>Opt Quant Electron</addtitle><description>Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated using surface parameters obtained from atomic force microscopy analysis (AFM) to describe surface morphology in zirconium dioxide layers (ZrO
2
) by RF magnetron sputtering method on substrate made of glass, which are prepared in argon and oxygen gas media. These surface morphology parameters are defined in the special ISO 25178-2 standard. Besides, the transmission of optical spectra and transparency of the samples are obtained by using the optical spectrometer.</description><subject>Argon</subject><subject>Characterization and Evaluation of Materials</subject><subject>Computer Communication Networks</subject><subject>Electrical Engineering</subject><subject>Glass substrates</subject><subject>Lasers</subject><subject>Magnetic properties</subject><subject>Magnetron sputtering</subject><subject>Morphology</subject><subject>Optical Devices</subject><subject>Optical properties</subject><subject>Optics</subject><subject>Parameters</subject><subject>Photonics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Thin films</subject><subject>Zirconium dioxide</subject><issn>0306-8919</issn><issn>1572-817X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp9kMtq3DAUhkVoINM0L5DVga6dHsny2OquhFwKgYGSQMhGyPLRRNPxpZJMmRfJ80buFLrrQkhw_svRx9glxyuOWH-JnGMjChT5SKx5IU7Yile1KBpeP39gKyxxXTSKqzP2McYdIq5lhSv2tpmSt2YPUxgnCslTBDN00HsbxpjCbNMcCEYHL2EjIL36AZzf9xE6msboE3XQHuDHLfRmO1AK4wBxmlOi4IftV7AmEsQ0dwfIE3KObIpLXOfzO9CQ4PcYfmYtJOrzBmbpi5_YqTP7SBd_73P2dHvzeH1fPGzuvl9_eyhsyVUqhBKNkp2smk6JqrZ8jQ22bWW5K6URao1YSWfKqm1bqYTAWnbWWUmkJFamLM_Z52Nu_v6vmWLSu3EOQ67UoualzJDqRSWOqoVJDOT0FHxvwkFz1At_feSvM3_9h78W2VQeTXFaUFD4F_0f1zsXsIr-</recordid><startdate>20221101</startdate><enddate>20221101</enddate><creator>Shakoury, Reza</creator><creator>Arman, Ali</creator><creator>Miri, Sadegh</creator><creator>Mardani, Mohsen</creator><creator>Rezaee, Sahar</creator><creator>Boochani, Arash</creator><creator>Amraee Rad, Ghasem</creator><creator>Sherafat, Khalil</creator><general>Springer US</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0002-7484-2177</orcidid><orcidid>https://orcid.org/0000-0002-3332-0620</orcidid><orcidid>https://orcid.org/0000-0001-5034-0810</orcidid><orcidid>https://orcid.org/0000-0003-1246-0453</orcidid><orcidid>https://orcid.org/0000-0002-2383-4169</orcidid></search><sort><creationdate>20221101</creationdate><title>Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures</title><author>Shakoury, Reza ; Arman, Ali ; Miri, Sadegh ; Mardani, Mohsen ; Rezaee, Sahar ; Boochani, Arash ; Amraee Rad, Ghasem ; Sherafat, Khalil</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c319t-292894d458d9257c16080bb5c1f34a2960054fa35bbb4922074dcfc4ee9405a33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Argon</topic><topic>Characterization and Evaluation of Materials</topic><topic>Computer Communication Networks</topic><topic>Electrical Engineering</topic><topic>Glass substrates</topic><topic>Lasers</topic><topic>Magnetic properties</topic><topic>Magnetron sputtering</topic><topic>Morphology</topic><topic>Optical Devices</topic><topic>Optical properties</topic><topic>Optics</topic><topic>Parameters</topic><topic>Photonics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Thin films</topic><topic>Zirconium dioxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shakoury, Reza</creatorcontrib><creatorcontrib>Arman, Ali</creatorcontrib><creatorcontrib>Miri, Sadegh</creatorcontrib><creatorcontrib>Mardani, Mohsen</creatorcontrib><creatorcontrib>Rezaee, Sahar</creatorcontrib><creatorcontrib>Boochani, Arash</creatorcontrib><creatorcontrib>Amraee Rad, Ghasem</creatorcontrib><creatorcontrib>Sherafat, Khalil</creatorcontrib><collection>CrossRef</collection><jtitle>Optical and quantum electronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shakoury, Reza</au><au>Arman, Ali</au><au>Miri, Sadegh</au><au>Mardani, Mohsen</au><au>Rezaee, Sahar</au><au>Boochani, Arash</au><au>Amraee Rad, Ghasem</au><au>Sherafat, Khalil</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures</atitle><jtitle>Optical and quantum electronics</jtitle><stitle>Opt Quant Electron</stitle><date>2022-11-01</date><risdate>2022</risdate><volume>54</volume><issue>11</issue><artnum>682</artnum><issn>0306-8919</issn><eissn>1572-817X</eissn><abstract>Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated using surface parameters obtained from atomic force microscopy analysis (AFM) to describe surface morphology in zirconium dioxide layers (ZrO
2
) by RF magnetron sputtering method on substrate made of glass, which are prepared in argon and oxygen gas media. These surface morphology parameters are defined in the special ISO 25178-2 standard. Besides, the transmission of optical spectra and transparency of the samples are obtained by using the optical spectrometer.</abstract><cop>New York</cop><pub>Springer US</pub><doi>10.1007/s11082-022-04071-2</doi><orcidid>https://orcid.org/0000-0002-7484-2177</orcidid><orcidid>https://orcid.org/0000-0002-3332-0620</orcidid><orcidid>https://orcid.org/0000-0001-5034-0810</orcidid><orcidid>https://orcid.org/0000-0003-1246-0453</orcidid><orcidid>https://orcid.org/0000-0002-2383-4169</orcidid></addata></record> |
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| subjects | Argon Characterization and Evaluation of Materials Computer Communication Networks Electrical Engineering Glass substrates Lasers Magnetic properties Magnetron sputtering Morphology Optical Devices Optical properties Optics Parameters Photonics Physics Physics and Astronomy Thin films Zirconium dioxide |
| title | Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-08T10%3A22%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Optical%20properties%20and%20microstructure%20of%20ZrO2%20thin%20films%20deposited%20by%20RF%20magnetron%20sputtering:%20case%20study%20on%20effects%20of%20different%20working%20temperatures&rft.jtitle=Optical%20and%20quantum%20electronics&rft.au=Shakoury,%20Reza&rft.date=2022-11-01&rft.volume=54&rft.issue=11&rft.artnum=682&rft.issn=0306-8919&rft.eissn=1572-817X&rft_id=info:doi/10.1007/s11082-022-04071-2&rft_dat=%3Cproquest_cross%3E2713464573%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2713464573&rft_id=info:pmid/&rfr_iscdi=true |