Numerical Study and Performance Analyses of Mems-Based Particle Velocity Sensor with Combined Inclined Rib Pair

The combined inclined rib pair (CIRP) is the first time proposed to improve the sensor performance of particle velocity sensor (PVS) by using a three-dimensional numerical method. The method is verified by the experiment results in the literature. The optimal plain channel parameters are determined...

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Veröffentlicht in:Journal of thermal science 2022, Vol.31 (5), p.1503-1517
Hauptverfasser: Zhu, Linhui, Zeng, Yibo, Guo, Hang
Format: Artikel
Sprache:eng
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