Hotspot Detection with Machine Learning Based on Pixel-Based Feature Extraction

The complexity of physical verification increases rapidly with fast shrinking technology nodes. Considering only design rule checking (DRC) constraints or lithography models cannot capture the side physical effects in the fabrication process well. Thus, it is desirable to consider a more general phy...

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Veröffentlicht in:Scientific programming 2022-08, Vol.2022, p.1-11
Hauptverfasser: Lin, Zhifeng, Gu, Zhenghua, Huang, Zhipeng, Bai, Xiqiong, Luo, Lixuan, Lin, Geng
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Sprache:eng
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