Reaction of nitrous oxide and ammonia molecules at 4H-SiC/SiO2 interface: An ab initio study

•The reaction N2O and NH3 molecules at 4H-SiC /SiO2 interface are theoretically investigated.•The desorption of carbon oxide in addition to Si–N bond formation occurs in the N2O reaction.•Various atomic configurations are formed depending on the plane orientation in the NH3 reaction.•The energy barr...

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Veröffentlicht in:	Surface science 2022-09, Vol.723, p.1, Article 122102
Hauptverfasser:	Akiyama, Toru, Shimizu, Tsunashi, Ito, Tomonori, Kageshima, Hiroyuki, Shiraishi, Kenji
Format:	Artikel
Sprache:	eng
Schlagworte:	Ammonia Configurations Mathematical analysis Nitrous oxide Oxidation Silicon carbide Silicon dioxide
Online-Zugang:	Volltext
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